References

ion beam source

customerproduct/service
ASML Optics U.S.A.IBF, Robot
BLS-Benelux Laser SystemsAutomation of a Laser cutting system
Bühler Alzenau GmbHOptical Monitoring System for Coating Machine
Changchun Institute of Optics
IBF, Robot
CRYSTAL GmbH IBF, Profile Measurement System
Heraeus Quarzglas GmbH & Co. KGThickness Measurement System
Hochschule Deggendorf Technologie CampusIBF
Institute of Plasma Physics AS TOPTECIBF
IOM Leibniz-Institut für Oberflächenmodifizierung e.V.IBF, PACE (Plasma Assisted Chemical Etching)
Korea Electro-Optics Co.IBF
Korea Research Institute of Standards an ScienceIBF
NIKON Corporation SagamiharaIBF, IBS, IBP, IBSE, Profile Measurement System, Thin Film Thickness Measurement System
NIKON Corporation TochigiIBF, High Precision Thickness Measurement System
NTGAutomation of an IBF System
OptoTech Optikmaschinen GmbHIBF
Toplens HangzhouSmart Stepper, Thickness Measurement System
Ultra-Precision Optics Research Korea Photonics Technolgy InstituteIBF
Wacker Schott AGseveral 12 channel Thickness Measurement System
XIAN Technological UniversityIBF, IBSE